Operating Range:20 to 200 mTorr
Vacuum Pump Type:Oil-Free Diaphragm
Maximum Flow Rate:500 L/min
Power Consumption:1.5 kW
Noise Level:55 dB(A)
Size:300 x 300 x 350 mm
Weight:25 kg
The Edwards D37420000 Vacuum Pump is a premium solution tailored for semiconductor manufacturing processes, ensuring consistent and precise vacuum levels necessary for high-quality wafer processing. Its robust design and efficient operation make it ideal for integration into modern semiconductor fabrication lines.
Equipped with a state-of-the-art oil-free diaphragm mechanism, this pump offers unparalleled reliability and minimal maintenance requirements, significantly reducing downtime and operational costs. The single-phase induction motor ensures smooth performance across a wide range of applications.
The pump operates within a versatile pressure range from 1 mTorr to 10 Torr, providing the flexibility needed for various stages of semiconductor production. Its maximum flow rate of 500 m^3/h at 1000 Pa ensures rapid evacuation capabilities, optimizing throughput and productivity.
With an efficiency rating of IE3, this pump is designed to meet stringent energy-saving standards, contributing to sustainable manufacturing practices. Its low noise level under 65 dB(A) at full load ensures a quiet working environment, enhancing operator comfort and safety.
For ease of maintenance and operational convenience, the Edwards D37420000 Vacuum Pump features a recommended maintenance interval of every 1,000 hours of operation. This schedule allows for proactive servicing, minimizing unexpected downtimes and ensuring continuous optimal performance.
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