EDGE6060A-G01 | RF Generator
Product Overview
The MKS EDGE6060A-G01 is a high-performance radio frequency (RF) generator engineered for precision plasma control in advanced industrial applications, such as semiconductor manufacturing, thin-film deposition, and plasma etching. Designed by MKS Instruments—a global leader in process control solutions—the EDGE6060A-G01 delivers stable RF power output to sustain plasma ionization, critical for maintaining process uniformity and yield in high-tech production environments.
This generator operates within the 60 MHz frequency band, a standard for plasma-based processes requiring high energy density and rapid response times. The EDGE6060A-G01 features modular design architecture, allowing seamless integration into existing or upgraded plasma systems. Its compact form factor and rugged construction ensure reliable operation in harsh industrial settings, while built-in diagnostic tools enable real-time monitoring of power output and system health.
Sold in “As-Is” condition, this EDGE6060A-G01 unit (part number 660-210103-100) offers a cost-effective solution for customers seeking MKS-quality performance without the premium of a new system. Hainan Jinlin Electromechanical, a certified distributor of industrial control products, provides pre-sales technical consultation to verify compatibility and post-sales support, including a one-year warranty, to ensure optimal functionality.

Technical Specifications
Parameter | Value |
---|---|
Product Model | MKS EDGE6060A-G01 (660-210103-100) |
Manufacturer | MKS Instruments |
Product Type | RF Generator |
Frequency Range | 60 MHz |
Output Power | Up to 10 kW (typical for EDGE series) |
Input Voltage | 200–208 VAC, 3-phase, 50/60 Hz |
Communication Protocol | RS485, analog I/O |
Cooling | Forced air/liquid (system-dependent) |
Dimensions | 19″ rack-mountable (482.6 x 309.8 x 508.76 mm) |
Weight | ~48 kg |
Key Features and Benefits
High-Power Plasma Generation
The EDGE6060A-G01 delivers up to 10 kW of RF power at 60 MHz, ideal for generating and sustaining plasma in applications like reactive ion etching (RIE) and physical vapor deposition (PVD). Its advanced impedance matching network ensures efficient power transfer to the plasma load, minimizing reflected power and maximizing process stability.
Modular Design for Flexibility
Designed with plug-and-play modules, the EDGE6060A-G01 allows easy field upgrades or component replacement. This modularity reduces downtime during maintenance and enables scalability for evolving production demands. For example, users can add auxiliary control modules to support multi-frequency plasma processes or integrate with MKS SmartMatch® tuning systems for automated impedance matching.

Real-Time Diagnostics
Built-in sensors monitor critical parameters such as forward/reverse power, temperature, and voltage standing wave ratio (VSWR). The EDGE6060A-G01 alerts operators to anomalies via digital outputs or remote communication, enabling proactive maintenance to prevent costly system failures. This diagnostic capability is particularly valuable in 24/7 manufacturing environments where uptime is paramount.
Compatibility with MKS Ecosystem
As part of MKS’s EDGE series, the EDGE6060A-G01 integrates seamlessly with other MKS components, including plasma chambers, pressure controllers, and process monitors. This interoperability ensures cohesive system performance and simplifies integration with third-party automation platforms. Hainan Jinlin Electromechanical’s expertise in MKS systems ensures smooth deployment and optimization.
Cost-Effective “As-Is” Solution
Sold in fully functional “As-Is” condition, this EDGE6060A-G01 unit offers significant cost savings compared to new equipment. Hainan Jinlin Electromechanical thoroughly tests and certifies all refurbished units to meet MKS’s original specifications, providing customers with reliable performance at a fraction of the price.
Related Models
- MKS EDGE6060A-G12 – Upgraded variant with enhanced cooling and extended temperature range for extreme industrial environments .
- MKS EDGE210R40A-G02 – 400 kHz RF generator for low-frequency plasma applications, such as sputtering and plasma-enhanced chemical vapor deposition (PECVD) .
- MKS EDGE10060A – 57–63 MHz generator with 10 kW output, suitable for high-throughput semiconductor manufacturing .
- MKS SmartMatch® Tuner – Companion module for automated impedance matching, optimizing power transfer in dynamic plasma processes.
- MKS 902B-11030 Pressure Transducer – Complementary sensor for real-time plasma chamber pressure monitoring.
For inquiries or customized solutions, contact Hainan Jinlin Electromechanical via WhatsApp or email: jllucky33@qq.com. As a certified partner of Bentley Nevada, Honeywell, and ABB, we specialize in industrial control components for process automation, discrete manufacturing, and infrastructure applications.