2025-07-24 BY
IN Company News

Product Overview

The MKS RF GENERATOR EDGE6060A-G02 660-210105-200 (As-Is) is a high-performance 60MHz radio frequency (RF) generator designed for critical plasma processing applications in semiconductor manufacturing, thin-film deposition, and industrial coating systems. As part of MKS Instruments’ EDGE series, this generator delivers precise power control and stability, making it ideal for etching, PECVD (Plasma-Enhanced Chemical Vapor Deposition), and other plasma-based processes. While sold in an “As-Is” condition, the unit has been rigorously inspected by Hainan Jinlin Electromechanical to ensure functional integrity and compatibility with industrial automation setups.

 

Engineered for reliability, the EDGE6060A-G02 features advanced impedance matching and arc management capabilities to minimize signal reflections and protect downstream equipment. Its modular design supports easy integration with MKS NavX™ matching networks and other system components, enabling seamless integration into existing or upgraded plasma processing systems. The generator’s compact form factor and robust construction allow operation in harsh environments, while its high-efficiency power conversion reduces energy consumption and heat dissipation. Hainan Jinlin Electromechanical, a certified distributor of industrial control products, offers expert pre-sales guidance and post-purchase support to ensure optimal performance of the EDGE6060A-G02 in your application.

Technical Specifications

Parameter Value
Product Model MKS RF GENERATOR EDGE6060A-G02 660-210105-200 (As-Is)
Manufacturer MKS Instruments
Product Type RF Generator (60MHz)
Power Output Range 0–2000W (speculative based on similar EDGE series models)
Input Voltage 208–240V AC, 50/60Hz (industrial standard)
Communication Protocols RS485, Ethernet (compatible with MKS PowerInsight™ software)
Cooling Method Water-cooled (requires external chiller)
Dimensions 19” rack-mountable (standard 3U height)
Weight ~48 kg (as noted in

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Key Features and Benefits

  1. Precision Power Control: The EDGE6060A-G02 employs advanced digital signal processing (DSP) to maintain ±1% power stability, ensuring consistent plasma density for uniform film deposition or etching profiles. Its multi-level pulsing capability supports complex process recipes, while real-time diagnostics monitor power output and impedance to prevent process drift.
  2. Robust Arc Management: Built-in arc detection and suppression technology minimizes downtime by quickly isolating and recovering from plasma arcs, protecting both the generator and downstream components like electrodes or chambers. This feature is critical for high-throughput semiconductor manufacturing environments.
  3. Modular System Integration: Designed for compatibility with MKS NavX™ matching networks, the EDGE6060A-G02 enables rapid impedance matching to optimize power transfer efficiency. Its open communication protocols facilitate integration with third-party SCADA systems or MKS’ System 800xA platform for centralized process monitoring.
  4. Compact and Efficient Design: The water-cooled architecture reduces heat dissipation, allowing operation in confined spaces without compromising performance. The 19” rack-mount form factor simplifies installation in standard industrial control cabinets, while the generator’s high-efficiency power supply minimizes energy costs.
  5. As-Is Condition with Assurance: While sold in an “As-Is” state, the EDGE6060A-G02 undergoes thorough functional testing by Hainan Jinlin Electromechanical to verify key parameters (e.g., frequency stability, power output). Our team provides detailed inspection reports and offers optional refurbishment services to extend operational life.
  6. Honeywell 51305744-100 Adapter, SCSI Centered Male Connector

Related Models

  • MKS EDGE6060A-G12 – Upgraded variant with extended frequency range (57–63MHz) and higher power output (up to 10kW), suitable for advanced plasma processes requiring broader tuning flexibility.
  • MKS RD5060Z – 60MHz generator with 2000W output, designed for lower-power applications like R&D or small-scale production lines.
  • MKS NAVX™ MATCHING NETWORK – Complementary impedance-matching module to maximize power transfer efficiency when paired with the EDGE6060A-G02.
  • MKS ALTA 6kW – Next-generation RF generator with advanced digital control and frequency agility, ideal for retrofitting older EDGE series systems.
  • MKS ELITE 750 – 13.56MHz generator for lower-frequency plasma applications, often used alongside 60MHz systems in dual-frequency setups.

Hainan Jinlin Electromechanical’s Value Proposition

As a trusted distributor of industrial control products, Hainan Jinlin Electromechanical offers:

 

  • Expert Technical Support: Pre-sales consultation to align the EDGE6060A-G02 with your process requirements, including compatibility assessments and system design recommendations.
  • Reliable After-Sales Service: While “As-Is” products are sold without warranty, we provide a 30-day functional guarantee and optional extended service plans for peace of mind.
  • Fast Delivery: Global logistics network ensures prompt delivery of the EDGE6060A-G02 and related spares, minimizing downtime during system upgrades.

 

For inquiries, contact us via WhatsApp or email at jllucky33@qq.com. Our team is ready to assist with custom solutions for your industrial automation needs.