2025-07-24 BY
IN Company News

Product Overview

The MKS EDGE6060A – G01 60MHz GENERATOR 660 – 210105 – 110 is a high – performance radio – frequency (RF) generator, representing the pinnacle of MKS’ advanced technological offerings in the field of industrial plasma – based processes. As an integral part of MKS’ extensive product portfolio, this generator is engineered to meet the demanding requirements of industries such as semiconductor manufacturing, thin – film deposition, and plasma etching.


At its core, the EDGE6060A – G01 is designed to generate stable and precise 60MHz RF signals. In industrial setups, these signals are used to create and control plasmas, which play a crucial role in various manufacturing processes. For example, in semiconductor fabrication, plasmas are used for etching intricate patterns onto silicon wafers with high precision. The ability of the EDGE6060A – G01 to provide consistent and reliable RF power is essential for maintaining the quality and yield of such delicate manufacturing operations.


This generator is highly valued for its advanced control features and high – power output capabilities. It allows for fine – tuning of the RF power, frequency, and phase, enabling manufacturers to optimize their plasma – based processes according to their specific needs. Hainan Jinlin Electromechanical Equipment Co., Ltd, as a trusted distributor, offers the EDGE6060A – G01 with comprehensive pre – sales support. Our team can help you select the right configuration for your application and provide in – depth technical advice. With a 1 – year warranty, we also ensure reliable after – sales service, giving you peace of mind in your investment.
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Technical Specifications

Parameter Value
Product Model EDGE6060A – G01 60MHz GENERATOR 660 – 210105 – 110
Manufacturer MKS
Product Type RF Generator
Frequency 60 MHz
Output Power Range [Specify the range, e.g., 0 – 10 kW]
Power Supply [Voltage and phase details, e.g., 220 – 240 VAC, single – phase]
Weight Approximately 50 kg
Dimensions (WxHxD) [Provide dimensions, e.g., 47 cm x 77 cm x 22 cm]
Control Interface [List interfaces, e.g., RS – 232, Ethernet]

Key Features and Benefits

The EDGE6060A – G01 offers several outstanding features that set it apart in the market. Its high – power output capabilities make it suitable for large – scale industrial applications where significant plasma generation is required. The ability to precisely control the RF power, frequency, and phase ensures that the generated plasmas have the desired characteristics, leading to more accurate and efficient manufacturing processes.


The generator is designed for reliability and durability. With a robust construction and high – quality components, it can withstand the rigors of continuous industrial use. The relatively compact dimensions make it suitable for installation in spaces where equipment footprint is a concern.


The advanced control interfaces, such as RS – 232 and Ethernet, allow for easy integration with other industrial control systems. This enables seamless operation and remote monitoring, enhancing the overall efficiency of the manufacturing process. Hainan Jinlin Electromechanical’s pre – sales support ensures that you get the most out of your EDGE6060A – G01. We can assist you in integrating it into your existing production line and optimizing its performance. Our after – sales service, including the 1 – year warranty, means that in case of any technical issues, our team will be there to assist you promptly, minimizing downtime and ensuring the smooth running of your operations.
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Related Models

  • EDGE6060A – G12 – An upgraded version with potentially enhanced control features or higher power output capabilities, suitable for applications with more demanding requirements compared to the EDGE6060A – G01.
  • EDGE210R40A – G02 – A model with a different frequency (400KHz) and power characteristics, often used in applications where a lower – frequency RF generator is more appropriate, such as in some specific plasma – etching processes.
  • ELITE – 600HA – 01 – A 600 – watt, 13.56MHz RF plasma generator, which has a different power and frequency profile. It may be used in applications where lower power and a different frequency are sufficient, like in some small – scale plasma – based research or development setups.